The customer's triple arm wafer transfer robotic arm SR8240-1105 stopped due to a malfunction and was sent to our company for repair. After investigation, it was found that the servo motor MC401AS 302KNN38 had malfunctioned. After replacing the motor, it can operate normally.

Advantages of the SR8240-1105 dual arm wafer loading and unloading robotic arm:

·Compact size;

·Suitable for 2-3 ports of 300mm;

·Independent dual end effectors can simultaneously pick up 2 wafers;

·The spacing can be synchronized with FOUP movement to place 2 wafers simultaneously.

Three arm wafer picking and placing robot arm SR8240-1105 parameters:

Body weight: 60 kg;

Cleanliness: ISO Class 1;

Sports mode: 3-link horizontal hinge;

Number of motion axes: 5;

Scope of work:

Z-axis (mm): 300;

TH axis (°):+/-180;

X-axis (mm): -440 to+440;

Roll axis (°):+/-275;

top speed:

Z-axis (mm/s): 500;

TH axis (rad/s): 7.82;

X-axis (mm/s): 1692;

Roll axis (rad/s): 9.24;

Linear motion (mm/s): 1000;

Reciprocal accuracy:

XY（mm）：+/-0.1；

Z（mm）：+/-0.1；

Wafer size: 200/300;

Control cabinet: SC5000-STD-0002.

Changke Intelligence can repair the following robot malfunctions:

Robot arm Cross Roller abnormality;

Abnormal replacement of RB Z-axis lead screw;

RB Z-axis brake abnormal replacement;

Abnormal replacement of RB Z-axis guide rail slider;

Triple Robot SERVO AMP version upgrade, HWDEF parameter content changes;

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